IEC IEC62047-50 Edition1.02025-04 INTERNATIONAL STANDARD Semiconductor devices- Micro-electromechanical devices- Part5o:MEMscapacitivemicrophones IEC 62047-50:2025-04(en) THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright@2025IEC,Geneva,Switzerland either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or your local IEC member National Committee for further information. IEC Secretariat Tel.: +41 22 919 02 11 3, rue de Varembe [email protected] CH-1211 Geneva 20 www.iec.ch Switzerland About the IEC The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes International Standards for all electrical, electronic and related technologies. About IEC publications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the latest edition, a corrigendum or an amendment might have been published IEC publications search -webstore.iec.ch/advsearchform IEc Products & Services Portal - products.iec.ch The advanced search enables to find IEC publications by a Discover our powerful search engine and read freely all the varietyof criteria(reference number,text, technical publications previews, graphical symbols and the glossary. With a subscription you wili always have access to up to date committee, ...). It also gives information on projects, replaced and withdrawn publications. content tailored to your needs. IEc Just Published -webstore.iec.ch/justpublished Electropedia-www.electropedia.org Stay up to date on all new IEC publications. Just Published The world's leading online dictionary on electrotechnology. details all new publications released. Available online and once containing more than 22 500 terminological entries in English a month by email. and French, with equivalent terms in 25 additional languages. Also known as the International Electrotechnical Vocabulary IEC Customer Service Centre -webstore.iec.ch/csc (IEV) online. If you wish to give us your feedback on this publication or need further assistance, please contact the Customer Service Centre: [email protected]. IEC IEC62047-50 Edition 1.0 2025-04 NTERNATIONAL STANDARD Semiconductor devices-Micro-electromechanical devices- Part 5o:MEMS capacitive microphones INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 31.080.99 ISBN 978-2-8327-0374-8 Warning! Make sure that you obtained this publication from an authorized distributor. IEC62047-50:2025@IEC2025 - 2 CONTENTS FOREWORD 1 Scope. 2 Normative references. 3 Terms and definitions. 4 Essential ratingsand characteristics 4.1 Ratings (limiting values). 4.2 Characteristics... 5 Test methods of MEMS capacitive sensorperformances. 6 Testmethods of MEMs capacitivemicrophones performances 6.1 Output impedance 6.2 Sensitivity 6.3 Noise floor. 6.4 Signal-to-noise ratio. 6.5 Dynamic range ... 10 6.6 Frequency response 6.7 Polarity. 6.8 Equivalent input noise 6.9 Total harmonic distortion 6.10 Power-supply rejection ratio. 6.11 Acoustic overload point Bibliography. 13 Figure1-Test system of MEMS capacitive sensor performances Figure 2 - Five-point sampling. Figure 3-Test connection graph of output impedance.. Table1-Performanceparameters of themicrophone IEC62047-50:2025@IEC2025 - 3 - INTERNATIONAL ELECTROTECHNICALCOMMISSION SEMICONDUCTORDEVICES MICRO-ELECTROMECHANICALDEVICES Part5o:MEMScapacitivemicrophones FOREWORD The International Electrotechnical Commission (IEC)is a worldwide organization for standardization comprising 1) all national electrotechnical committees (IEC National Committees).The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to otheractivities,IEC publishes International Standards,Technical Specifications,Technical Reports Publicl