IEC IEC62047-28 Edition 1.02017-01 INTERNATIONAL STANDARD colour inside Semiconductordevices-Micro-electromechanicaldevices- Part 28: Performance testing method of vibration-driven MEMS electret energy harvestingdevices IEC 62047-28:2017-01(en) mational Ele THISPUBLICATIONIS COPYRIGHTPROTECTED Copyright2017IEC,Geneva,Switzerland or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication, piease contact the address below or your local IEC member National Committee for further information. IEC Central Office Tel.: +41 22 919 02 11 3,rue de Varembe Fax:+4122 919 03 00 CH-1211Geneva 20 [email protected] Switzerland www.iec.ch AbouttheIEC International Standards for all electrical, electronic and related technologies. About IECpublications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the latest edition, a corrigenda oran amendment might have been published. IEc Catalogue-webstore.iec.ch/catalogue Electropedia-www.electropedia.org The stand-alone application forconsulting theentire The world's leading online dictionary of electronic and bibliographical information on IEc International Standards, electrical terms containing 20 000 terms and definitions in Technical Specifications,_Technical Reports and other English and French, with equivalent terms in 16 additional documents. Available for PC, Mac OS, Android Tablets and languages. Also known as the International Electrotechnical iPad. Vocabulary (IEV) online. IEC Glossary - std.iec.ch/glossary IEC publicationssearch-www.iec.ch/searchpub The advanced search enables to find IEC publications by a 65 000 electrotechnical terminology entries in English and variety.of criteria (reference number, text, technical French extracted from the Terms and Definitions clause of iEC publications issued since 2002. Some entries have been committee,...). It also gives information on projects, replaced and withdrawn publications. collected from earlier publications of IEC TC 37, 77, 86 and CISPR. IECJustPublished-webstore.iec.ch/justpublished Stay up to date on all new IEC publications. Just Published IEc Customer Service Centre -webstore.iec.ch/csc details all new publications released. Available online and If you wish to give us your feedback on this publication or also once a month by email. need further assistance, please contact the Customer Service Centre:[email protected]. Intemational Electrotechnical Commission IHS under license with IE IEC IEC 62047-28 Edition 1.0 2017-01 INTERNATIONAL STANDARD colour inside Semiconductordevices-Micro-electromechanical devices- Part 28: Performance testing method of vibration-driven MEMS electret energy harvestingdevices INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 31.080.99 ISBN 978-2-8322-3819-6 Warning!Make sure that you obtained this publication froman authorized distributor. ?Re imissior IHS under I