ISO INTERNATIONAL STANDARD 14706 Second edition 2014-08-01 Surface chemical analysis Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy Analyse chimique des surfaces-Détermination de la contamination en élements a la surface des tranches de silicium par spectroscopie de fluorescence X a réflexion totale Reference number ISO 14706:2014(E) LSO @ IS0 2014 I without license from IHS Not for Resale IS0 14706:2014(E) COPYRIGHTPROTECTEDDOCUMENT @ IS0 2014 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56:CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ IS0 2014 - All rights reserved No reproductic networking permited without license from IHS Not for Resale IS0 14706:2014(E) Contents Page Foreword ..iv Introduction. ..V 1 Scope. ..1 2 Normative reference ..1 3 Terms and definitions ..1 4 Abbreviated terms ..2 5 Principle. ..2 6 Apparatus ..3 7 Environment for specimen preparation and measurement .3 8 Calibration reference materials ..3 9 Safety ..4 10 Measurement procedure. ..4 10.1 Preparation for measurement 10.2 Preparing a calibration curve 4 10.3 Measurement of a test specimen .5 11 Expression of results .5 11.1 Method of calculation. .5 11.2 Blank correction .6 12 Precision ..6 13 Test report ..6 Annex A (informative) Reference materials ..8. Annex B (informative) Relative sensitivity factor ..9 Annex C (informative) Preparation of reference materials[6] ..13 Annex D (informative) VPD-TXRF method ..16 Annex E (informative) Glancing-angle settings .18 Annex F (informative) International inter-laboratory test results .22 Bibliography .25 iii Stal thout license from IHS Not for Resale